What Is EUV Lithography? Why ASML Matters in the AI Chip Cycle
What Is EUV Lithography?
Feature | DUV | EUV |
Light wavelength | 193 nanometers | 13.5 nanometers |
Used for | Mature nodes and less critical layers | The most advanced critical layers |
Patterning | Needs many repeated exposure steps for small features | Prints tiny features in fewer steps |
Suppliers | ASML, Nikon, Canon | ASML alone |
Why Does EUV Matter for Advanced AI Chips?
Why Does ASML Matter?
How Do Investors Read ASML as an AI CapEx Signal?
Metric | 2025 snapshot |
Total net sales | €32.7 billion |
Fourth-quarter net bookings | €13.2 billion, of which €7.4 billion was EUV |
Order backlog at year end | €38.8 billion |
Gross margin | 52.8% |
What Are the Risks?
FAQ
What is EUV lithography in simple terms?
Why is ASML the only EUV company?
Does ASML make chips?
What is High-NA EUV?

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